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Maskless nano-implant of 20keV Ga+ in bulk Si(100) substrat..:

Milazzo, R.G. ; D'Arrigo, G. ; Mio, A.M....
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  341 (2014)  - p. 7-12 , 2014
Link: https://doi.org/10.1016/j.nimb.2013.11.044