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Exploring cryogenic focused ion beam milling as a Group III..:

Dolph, Melissa Commisso ; Santeufemio, Christopher
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  328 (2014)  - p. 33-41 , 2014
Link: https://doi.org/10.1016/j.nimb.2014.02.126