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MeV ion beam lithography of biocompatible halogenated Paryl..:

Whitlow, Harry J. ; Norarat, Rattanaporn ; Roccio, Marta...
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  354 (2015)  - p. 34-36 , 2015
Link: https://doi.org/10.1016/j.nimb.2014.10.024