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Scanning electron microscopy of the surfaces of ion implant..:

Malherbe, Johan B. ; van der Berg, N.G. ; Kuhudzai, R.J....
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  354 (2015)  - p. 23-27 , 2015
Link: https://doi.org/10.1016/j.nimb.2015.01.045