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Determination of the accuracy for targeted irradiations of ..:

Siebenwirth, C. ; Greubel, C. ; Drexler, S.E....
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  348 (2015)  - p. 137-142 , 2015
Link: https://doi.org/10.1016/j.nimb.2015.01.064