I agree that this site is using cookies. You can find further informations here.
X
Merkliste 
 1 Ergebnisse 
 
1

Contamination by slow diffusers in ion implantation process..:

Polignano, M.L. ; Mica, I. ; Barbarossa, F....
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  356-357 (2015)  - p. 164-171 , 2015
Link: https://doi.org/10.1016/j.nimb.2015.04.069