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Incorporation of oxygen in SiC implanted with hydrogen:

Barcz, A. ; Jakieła, R. ; Kozubal, M...
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  365 (2015)  - p. 146-149 , 2015
Link: https://doi.org/10.1016/j.nimb.2015.07.026