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Roughness evolution of sol–gel optical coatings by ion beam..:

Gailly, P. ; Dubreuil, O. ; Fleury-Frenette, K.
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  365 (2015)  - p. 17-21 , 2015
Link: https://doi.org/10.1016/j.nimb.2015.07.030