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Ion induced modifications of Mn-doped ZnO films:

Matsunami, N. ; Itoh, M. ; Kato, M....
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  365 (2015)  - p. 191-195 , 2015
Link: https://doi.org/10.1016/j.nimb.2015.08.010