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Peculiarities of latent track etching in SiO2/Si structures..:

Al'zhanova, A. ; Dauletbekova, A. ; Komarov, F....
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  374 (2016)  - p. 121-124 , 2016
Link: https://doi.org/10.1016/j.nimb.2015.08.046