I agree that this site is using cookies. You can find further informations here.
X
Merkliste 
 1 Ergebnisse 
 
1

Plasma immersion ion implantation: A viable candidate for l..:

Kouadri-boudjelthia, E.-A. ; Ntsoenzok, E. ; Benoit, R....
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  366 (2016)  - p. 150-154 , 2016
Link: https://doi.org/10.1016/j.nimb.2015.10.071