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Design considerations for a compact proton beam writing sys..:

Xu, Xinxin ; Liu, Nannan ; Raman, P. Santhana...
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  404 (2017)  - p. 243-249 , 2017
Link: https://doi.org/10.1016/j.nimb.2016.12.031