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SCALP, a platform dedicated to material modifications and c..:

Bacri, C.-O. ; Bachelet, C. ; Baumier, C....
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  406 (2017)  - p. 48-52 , 2017
Link: https://doi.org/10.1016/j.nimb.2017.03.036