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Homojunction silicon solar cells doping by ion implantation:

Milési, Frédéric ; Coig, Marianne ; Lerat, Jean-François...
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  409 (2017)  - p. 53-59 , 2017
Link: https://doi.org/10.1016/j.nimb.2017.06.020