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Mass spectrometric investigation of material sputtered unde..:

Breuer, L. ; Ernst, P. ; Herder, M....
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  435 (2018)  - p. 101-110 , 2018
Link: https://doi.org/10.1016/j.nimb.2017.10.019