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Effect of helium ion beam treatment on wet etching of silic..:

Petrov, Yu.V. ; Grigoryev, E.A. ; Sharov, T.V..
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  418 (2018)  - p. 94-100 , 2018
Link: https://doi.org/10.1016/j.nimb.2018.01.011