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Size effect in AlN/SiN multilayered films irradiated with h..:

Uglov, V.V. ; Kvasov, N.T. ; Remnev, G.E....
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  435 (2018)  - p. 228-235 , 2018
Link: https://doi.org/10.1016/j.nimb.2018.01.012