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The quantitative analysis of silicon carbide surface smooth..:

Ieshkin, A.E. ; Kireev, D.S. ; Ermakov, Yu.A....
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  421 (2018)  - p. 27-31 , 2018
Link: https://doi.org/10.1016/j.nimb.2018.02.019