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The RBS analysis for a thin amorphous Si layer formed on cl..:

Yachida, G. ; Inoue, K. ; Hoshino, Y..
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  450 (2019)  - p. 229-233 , 2019
Link: https://doi.org/10.1016/j.nimb.2018.05.031