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Ion irradiation effects on WNxOy thin films:

Matsunami, N. ; Okayasu, S. ; Sataka, M..
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  435 (2018)  - p. 146-151 , 2018
Link: https://doi.org/10.1016/j.nimb.2018.05.044