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Cu ion implantation improves the performance of Si film ano..:

Hu, Zheng-Guang ; Tan, Zhi-Yuan ; Lin, Zhong...
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  440 (2019)  - p. 191-196 , 2019
Link: https://doi.org/10.1016/j.nimb.2018.06.016