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Optimizing lateral homogeneity of ion-induced surface modif..:

Taiber, Jochen ; Buchegger, Sascha ; Stritzker, Bernd..
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  433 (2018)  - p. 98-105 , 2018
Link: https://doi.org/10.1016/j.nimb.2018.07.034