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The sputtering yield of crystalline Si(1 0 0) surface by mo..:

Hoshino, Y. ; Yachida, G.
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  460 (2019)  - p. 155-160 , 2019
Link: https://doi.org/10.1016/j.nimb.2018.12.011