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Modification of Zn ion hot implanted Si by swift Xe ion irr..:

Privezentsev, V.V. ; Skuratov, V.A. ; Kulikauskas, V.S....
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  460 (2019)  - p. 56-59 , 2019
Link: https://doi.org/10.1016/j.nimb.2019.01.040