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Comparison of defect structure in Si and Ge ion implanted G..:

Pągowska, K.D. ; Kozubal, M. ; Taube, A....
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  444 (2019)  - p. 74-79 , 2019
Link: https://doi.org/10.1016/j.nimb.2019.01.053