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Effective depth of electronic sputtering of WO3 films by hi..:

Matsunami, N. ; Sataka, M. ; Okayasu, S.
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  460 (2019)  - p. 185-188 , 2019
Link: https://doi.org/10.1016/j.nimb.2019.04.011