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A ∼100 μm-resolution position-sensitive detector for slow p..:

Amsler, C. ; Antonello, M. ; Belov, A....
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  457 (2019)  - p. 44-48 , 2019
Link: https://doi.org/10.1016/j.nimb.2019.07.015