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Effect of nitrogen ion implantation in semi insulating 6H-S..:

Kamalakkannan, K. ; Rajaraman, R. ; Sundaravel, B...
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  457 (2019)  - p. 24-29 , 2019
Link: https://doi.org/10.1016/j.nimb.2019.07.027