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A generalized fitting tool for analysis of two-dimensional ..:

David-Bosne, E. ; Wahl, U. ; Correia, J.G....
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  462 (2020)  - p. 102-113 , 2020
Link: https://doi.org/10.1016/j.nimb.2019.10.029