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SIGMA: A Set-up for In-situ Growth, Material modification a..:

Kantre, K. ; Moro, M.V. ; Moldarev, D....
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  463 (2020)  - p. 96-100 , 2020
Link: https://doi.org/10.1016/j.nimb.2019.11.007