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Characterization of microcraters fabricated on the silicon ..:

Rahman, T.U. ; Khan, R.A.A. ; Qayyum, H....
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  487 (2021)  - p. 45-51 , 2021
Link: https://doi.org/10.1016/j.nimb.2020.11.011