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Laterally controlled ultra-low energy ion implantation usin..:

Auge, M. ; Junge, F. ; Hofsäss, H.
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  512 (2022)  - p. 96-101 , 2022
Link: https://doi.org/10.1016/j.nimb.2021.12.001