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Extending defect models for Si processing: The role of ener..:

Santos, Iván ; Caballo, Ana ; Aboy, María...
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  512 (2022)  - p. 54-59 , 2022
Link: https://doi.org/10.1016/j.nimb.2021.12.002