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On the origin of nanoripples on silicon by gas cluster-ion ..:

Kireev, D.S. ; Ryabtsev, M.O. ; Tatarintsev, A.A..
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  520 (2022)  - p. 8-12 , 2022
Link: https://doi.org/10.1016/j.nimb.2022.03.017