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Radiation effects on He+- and H+-implantation for ion slici..:

Ma, Yujie ; Lin, Senhua ; Qiu, Yizhi...
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  533 (2022)  - p. 1-8 , 2022
Link: https://doi.org/10.1016/j.nimb.2022.10.013