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Comparison of PMMA shrinkage in ion beam lithography: PMMA ..:

Romanenko, Oleksandr ; Lavrentiev, Vasily ; Borodkin, Andrei..
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  538 (2023)  - p. 123-130 , 2023
Link: https://doi.org/10.1016/j.nimb.2023.02.001