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Research on the surface damage of Si+ and H+ co-implanted 6..:

Dong, Wenhui ; Shen, Qiang ; Wei, Mingyan...
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  538 (2023)  - p. 81-86 , 2023
Link: https://doi.org/10.1016/j.nimb.2023.02.030