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In Plasma ion beam analysis of polymer layer and adsorbed H..:
Fortier, Louis-Charles
;
Chicoine, Martin
;
Chouteau, Simon
...
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 554 (2024) - p. 165439 , 2024
Link:
https://doi.org/10.1016/j.nimb.2024.165439
RT Journal T1 <Title>In Plasma ion beam analysis of polymer layer and adsorbed H monolayer etching</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.nimb.2024.165439&Exemplar=1&LAN=DE A1 Fortier, Louis-Charles A1 Chicoine, Martin A1 Chouteau, Simon A1 Clausse, Mathilde A1 Lalande, Émile A1 Lussier, Alexandre W. A1 Roorda, Sjoerd A1 Stafford, Luc A1 Terwagne, Guy A1 Schiettekatte, François PB Elsevier BV YR 2024 SN 0168-583X JF Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms VO 554 SP 165439 LK http://dx.doi.org/https://doi.org/10.1016/j.nimb.2024.165439 DO https://doi.org/10.1016/j.nimb.2024.165439 SF ELIB - SuUB Bremen
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