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Fabrication of broadband anti-reflective sub-micron structu..:

Lee, Yeeu-Chang ; Chang, Che-Chun ; Chou, Yen-Yu
Photonics and Nanostructures - Fundamentals and Applications.  12 (2014)  1 - p. 16-22 , 2014
Link: https://doi.org/10.1016/j.photonics.2013.07.007