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C60 films as etching masks for creation of micrometer and s..:

Vincenc Oboňa, J. ; Chromik, Š. ; Španková, M...
Physica C: Superconductivity and its Applications.  435 (2006)  1-2 - p. 37-40 , 2006
Link: https://doi.org/10.1016/j.physc.2006.01.014