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1 Ergebnisse
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Compound mechanical and chemical-mechanical polishing proce..:
Ban, Xinxing
;
Tian, Zhuangzhi
;
Zhu, Jianhui
...
Precision Engineering. 86 (2024) - p. 160-169 , 2024
Link:
https://doi.org/10.1016/j.precisioneng.2023.12.002
RT Journal T1
Compound mechanical and chemical-mechanical polishing processing technique for single-crystal silicon carbide
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.precisioneng.2023.12.002&Exemplar=1&LAN=DE A1 Ban, Xinxing A1 Tian, Zhuangzhi A1 Zhu, Jianhui A1 Duan, Tianxu A1 Zheng, Shaodong A1 Wang, Ningchang A1 Han, Shaoxing A1 Qiu, Hui A1 Li, Zhengxin PB Elsevier BV YR 2024 SN 0141-6359 JF Precision Engineering VO 86 SP 160 OP 169 LK http://dx.doi.org/https://doi.org/10.1016/j.precisioneng.2023.12.002 DO https://doi.org/10.1016/j.precisioneng.2023.12.002 SF ELIB - SuUB Bremen
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