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Technological sustainable materials and enabling in semicon..:

Gan, Chong Leong ; Chung, Min-Hua ; Zou, Yung-Sheng..
e-Prime - Advances in Electrical Engineering, Electronics and Energy.  5 (2023)  - p. 100245 , 2023
Link: https://doi.org/10.1016/j.prime.2023.100245