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A novel automatic virtual metrology system architecture for..:

Hung, Min-Hsiung ; Tsai, Wen-Huang ; Yang, Haw-Ching..
Robotics and Computer-Integrated Manufacturing.  28 (2012)  4 - p. 559-568 , 2012
Link: https://doi.org/10.1016/j.rcim.2012.01.002