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1 Ergebnisse
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Effect of oxidation on electromigration in 2-µm Cu redistri..:
Tseng, I-Hsin
;
Hsu, Po-Ning
;
Hsu, Wei-You
...
Results in Physics. 31 (2021) - p. 105048 , 2021
Link:
https://doi.org/10.1016/j.rinp.2021.105048
RT Journal T1
Effect of oxidation on electromigration in 2-µm Cu redistribution lines capped with polyimide
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.rinp.2021.105048&Exemplar=1&LAN=DE A1 Tseng, I-Hsin A1 Hsu, Po-Ning A1 Hsu, Wei-You A1 Tran, Dinh-Phuc A1 Lin, Benson Tsu-Hung A1 Chang, Chia-Cheng A1 Tu, K.N. A1 Chen, Chih PB Elsevier BV YR 2021 SN 2211-3797 JF Results in Physics VO 31 SP 105048 LK http://dx.doi.org/https://doi.org/10.1016/j.rinp.2021.105048 DO https://doi.org/10.1016/j.rinp.2021.105048 SF ELIB - SuUB Bremen
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