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Sweeping total reflection X-ray fluorescence optimisation t..:
Borde, Yannick
;
Danel, Adrien
;
Roche, Agnes
.
Spectrochimica Acta Part B: Atomic Spectroscopy. 63 (2008) 12 - p. 1370-1374 , 2008
Link:
https://doi.org/10.1016/j.sab.2008.10.034
RT Journal T1 <Title>Sweeping total reflection X-ray fluorescence optimisation to monitor the metallic contamination into IC manufacturing</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.sab.2008.10.034&Exemplar=1&LAN=DE A1 Borde, Yannick A1 Danel, Adrien A1 Roche, Agnes A1 Veillerot, Marc PB Elsevier BV YR 2008 SN 0584-8547 JF Spectrochimica Acta Part B: Atomic Spectroscopy VO 63 IS 12 SP 1370 OP 1374 LK http://dx.doi.org/https://doi.org/10.1016/j.sab.2008.10.034 DO https://doi.org/10.1016/j.sab.2008.10.034 SF ELIB - SuUB Bremen
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