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Depth-profile analysis of thermoelectric layers on Si wafer..:
Reinsberg, K.-G.
;
Schumacher, C.
;
Tempez, A.
..
Spectrochimica Acta Part B: Atomic Spectroscopy. 76 (2012) - p. 175-180 , 2012
Link:
https://doi.org/10.1016/j.sab.2012.06.005
RT Journal T1 <Title>Depth-profile analysis of thermoelectric layers on Si wafers by pulsed r.f. glow discharge time-of-flight mass spectrometry</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.sab.2012.06.005&Exemplar=1&LAN=DE A1 Reinsberg, K.-G. A1 Schumacher, C. A1 Tempez, A. A1 Nielsch, K. A1 Broekaert, J.A.C. PB Elsevier BV YR 2012 SN 0584-8547 JF Spectrochimica Acta Part B: Atomic Spectroscopy VO 76 SP 175 OP 180 LK http://dx.doi.org/https://doi.org/10.1016/j.sab.2012.06.005 DO https://doi.org/10.1016/j.sab.2012.06.005 SF ELIB - SuUB Bremen
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