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Effect of silicon nitride coating thickness on silicon wafe..:
Kaplan, Dilara
;
Yalçın, Şerife H.
Spectrochimica Acta Part B: Atomic Spectroscopy. 194 (2022) - p. 106472 , 2022
Link:
https://doi.org/10.1016/j.sab.2022.106472
RT Journal T1
Effect of silicon nitride coating thickness on silicon wafer substrates for signal enhancement in laser-induced breakdown spectroscopic analysis of liquids
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.sab.2022.106472&Exemplar=1&LAN=DE A1 Kaplan, Dilara A1 Yalçın, Şerife H. PB Elsevier BV YR 2022 SN 0584-8547 JF Spectrochimica Acta Part B: Atomic Spectroscopy VO 194 SP 106472 LK http://dx.doi.org/https://doi.org/10.1016/j.sab.2022.106472 DO https://doi.org/10.1016/j.sab.2022.106472 SF ELIB - SuUB Bremen
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