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Diaphragmless pressure sensor:

Krivorotov, N.P. ; Svinolupov, Yu.G. ; Izaak, T.I..
Sensors and Actuators A: Physical.  113 (2004)  3 - p. 350-354 , 2004
Link: https://doi.org/10.1016/j.sna.2004.03.073