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1 Ergebnisse
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A piezoelectric micro-actuator with a three-dimensional str..:
Gao, Peng
;
Yao, Kui
;
Tang, Xiaosong
...
Sensors and Actuators A: Physical. 130-131 (2006) - p. 491-496 , 2006
Link:
https://doi.org/10.1016/j.sna.2005.11.008
RT Journal T1 <Title>A piezoelectric micro-actuator with a three-dimensional structure and its micro-fabrication</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.sna.2005.11.008&Exemplar=1&LAN=DE A1 Gao, Peng A1 Yao, Kui A1 Tang, Xiaosong A1 He, Xujiang A1 Shannigrahi, Santiranjan A1 Lou, Yaolong A1 Zhang, Jian A1 Okada, Kanzo PB Elsevier BV YR 2006 SN 0924-4247 JF Sensors and Actuators A: Physical VO 130-131 SP 491 OP 496 LK http://dx.doi.org/https://doi.org/10.1016/j.sna.2005.11.008 DO https://doi.org/10.1016/j.sna.2005.11.008 SF ELIB - SuUB Bremen
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