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Thick PZT layers deposited by gas flow sputtering:
Jacobsen, H.
;
Quenzer, H.-J.
;
Wagner, B.
..
Sensors and Actuators A: Physical. 135 (2007) 1 - p. 23-27 , 2007
Link:
https://doi.org/10.1016/j.sna.2006.10.011
RT Journal T1 <Title>Thick PZT layers deposited by gas flow sputtering</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.sna.2006.10.011&Exemplar=1&LAN=DE A1 Jacobsen, H. A1 Quenzer, H.-J. A1 Wagner, B. A1 Ortner, K. A1 Jung, Th. PB Elsevier BV YR 2007 SN 0924-4247 JF Sensors and Actuators A: Physical VO 135 IS 1 SP 23 OP 27 LK http://dx.doi.org/https://doi.org/10.1016/j.sna.2006.10.011 DO https://doi.org/10.1016/j.sna.2006.10.011 SF ELIB - SuUB Bremen
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